JPH0625969Y2 - 光路長制御用圧電アクチュエータ構造体 - Google Patents
光路長制御用圧電アクチュエータ構造体Info
- Publication number
- JPH0625969Y2 JPH0625969Y2 JP5402690U JP5402690U JPH0625969Y2 JP H0625969 Y2 JPH0625969 Y2 JP H0625969Y2 JP 5402690 U JP5402690 U JP 5402690U JP 5402690 U JP5402690 U JP 5402690U JP H0625969 Y2 JPH0625969 Y2 JP H0625969Y2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric actuator
- ring
- optical path
- electrode
- path length
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 title claims description 22
- 238000002789 length control Methods 0.000 title claims description 4
- 239000000853 adhesive Substances 0.000 claims description 9
- 230000001070 adhesive effect Effects 0.000 claims description 9
- 239000000956 alloy Substances 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 5
- 238000006073 displacement reaction Methods 0.000 description 11
- 230000002093 peripheral effect Effects 0.000 description 8
- 239000011521 glass Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
Landscapes
- Gyroscopes (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5402690U JPH0625969Y2 (ja) | 1990-05-23 | 1990-05-23 | 光路長制御用圧電アクチュエータ構造体 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5402690U JPH0625969Y2 (ja) | 1990-05-23 | 1990-05-23 | 光路長制御用圧電アクチュエータ構造体 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0412672U JPH0412672U (en]) | 1992-01-31 |
JPH0625969Y2 true JPH0625969Y2 (ja) | 1994-07-06 |
Family
ID=31575724
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5402690U Expired - Lifetime JPH0625969Y2 (ja) | 1990-05-23 | 1990-05-23 | 光路長制御用圧電アクチュエータ構造体 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0625969Y2 (en]) |
-
1990
- 1990-05-23 JP JP5402690U patent/JPH0625969Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0412672U (en]) | 1992-01-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |